Random Surface Texturing of Silicon Dioxide Using Gold Agglomerates

Abstract

A fabrication process for creating a silicon dioxide (SiO2) light-trapping structure as part of an anti-reflective (AR) coating has been developed. A thin e-beam-deposited gold layer, when deposited onto an oxide surface, will coalesce into an even distribution of irregular agglomerates, also known as complete islanding. By using these gold agglomerations as a metal mask, the SiO2 can be etched using an inductively coupled plasma system. The result is a textured surface structure, which can then be used as a light-trapping top layer in an AR coating on solar cells.

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Document Details

Document Type
Technical Report
Publication Date
Jul 01, 2016
Accession Number
AD1011570

Entities

People

  • Kimberley A. Olver

Organizations

  • United States Army Research Laboratory

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Agglomerates (Rock)
  • Antireflection Coatings
  • Cells
  • Charge Carriers
  • Coatings
  • Dioxides
  • Elements
  • Fabrication
  • Films
  • Materials
  • Military Research
  • Oxides
  • Silicon
  • Silicon Dioxide
  • Solar Cells
  • Thin Films

Readers

  • Nanofabrication and Microfabrication.
  • Powder metallurgy of Titanium alloys.
  • Surface Coatings Technology.