Nonlinear Elasticity of Doped Semiconductors
Abstract
In this report Michigan State University (MSU) provides the results of studying the temperature dependence of thefrequency shift and the amplitude dependence of the vibration frequency for <100> length extension modes in n-dopedsilicon (Si) microelectromechanical (MEMS) resonators. MSU also has started a comparison with the experimental datafrom the Stanford University group. The obtained results show that the goal of the project has been reached. MSU hasfull quantitative theory of the temperature- and density-dependent change of the vibration frequency of eigenmodes inresonators and of their dependence on the vibration amplitude.
Document Details
- Document Type
- Technical Report
- Publication Date
- Feb 01, 2017
- Accession Number
- AD1026641
Entities
People
- Kirill Moskovtsev
- Mark Dykman
Organizations
- Michigan State University