High Transparent Conductive Aluminum-Doped Zinc Oxide Thin Films by Reactive Co-Sputtering (Postprint)

Abstract

Al-doped ZnO films were fabricated using reactive magnetron sputtering simultaneously using separate Zn and Al targets. The AZO films showed high transparency in the visible region and low transmittance in the near IR regions.

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Document Details

Document Type
Technical Report
Publication Date
Mar 30, 2016
Accession Number
AD1034785

Entities

People

  • John G Jones
  • John Grant
  • Lirong Sun
  • Neil R. Murphy

Organizations

  • General Dynamics

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Abstracts
  • Air Force
  • Air Force Research Laboratories
  • Aluminum
  • Electrical Properties
  • Films
  • Information Systems
  • Magnetrons
  • Materials
  • Materials Science
  • Measurement
  • Optical Properties
  • Sputtering
  • Thin Films
  • Transmittance
  • Transparencies
  • X Rays

Fields of Study

  • Materials science

Readers

  • Materials Science and Engineering.
  • Semiconductor Device Technology
  • Spectroscopy.