INDEPENDENT EVALUATION OF THE GAM EX5ALN MINIATURE LINE-NARROWED KRF EXCIMER LASER
Abstract
The scope of this effort was to determine how the GAM Ex5ALN Line-Narrowed Ruggedized KrF Excimer Laser operates compared to the manufacturers specifications. Evaluation criteria included measurements of the output power, pulse-to-pulse stability, laser pulse length, bandwidth, trigger jitter, pulse profile, and fill-gas lifetime. In general, the laser performs satisfactorily and in accord with the manufacturers specifications. Principal recommendations are for the manufacturer to resolve software problems and provide more complete instructions for installation, servicing, and operation.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jun 01, 2017
- Accession Number
- AD1038444
Entities
People
- Bradley R. Arnold
- Castle Gushen
- Corryn Wheatley
- Nicole Couturier
Organizations
- University of Maryland, Baltimore County