Optimization of Easy Atomic Force Microscope (ezAFM) Controls for Semiconductor Nanostructure Profiling

Abstract

The US Army Research Laboratory recently procured an Easy Atomic Force Microscope (ezAFM), from a NanoMagnetics vendor. The ezAFM can profile nanostructures on the order of 2.0 A in the vertical (z) directions. There are several instruments controls like proportional, integral, and derivative (PID) gain as well as tip force and laser power that have to be set right to get best surface profiling of semiconductor nanostructured materials. In this report, we present how to obtain good-quality profiling pictures using ezAFM by varying PID values. We used the equipment supplier-provided standard calibration samples as well as our in-house-grown nanostructure samples.

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Document Details

Document Type
Technical Report
Publication Date
Sep 01, 2017
Accession Number
AD1039992

Entities

People

  • Naresh Das
  • Satwik Bisoi

Organizations

  • United States Army Research Laboratory

Tags

Communities of Interest

  • Advanced Electronics
  • Air Platforms

DTIC Thesaurus Topics

  • Amplitude
  • Calibration
  • Computing Devices
  • Department Of Defense
  • Frequency
  • Materials
  • Measurement
  • Microscopes
  • Military Research
  • Nanostructures
  • Noise
  • Optimization
  • Roughness
  • Semiconductors
  • Standards
  • Three Dimensional
  • Two Dimensional

Fields of Study

  • Physics

Readers

  • Acoustics.
  • Nanoscale Plasmonic Nanotechnology
  • Systems Analysis and Design

Technology Areas

  • Directed Energy
  • Microelectronics
  • Microelectronics - Graphene