Aberration Compensation in Aplanatic Solid Immersion Lens Microscopy

Abstract

The imaging quality of an aplanatic SIL microscope is shown to be significantly degraded by aberrations, especially when the samples have thicknesses that are more than a few micrometers thicker or thinner than the design thickness. Aberration due to the sample thickness error is modeled and compared with measurements obtained in a high numerical aperture (NA ~3.5) microscope. A technique to recover near-ideal imaging quality by compensating aberrations using a MEMS deformable mirror is described and demonstrated.

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Document Details

Document Type
Technical Report
Publication Date
Nov 08, 2013
Accession Number
AD1041922

Entities

People

  • Bennett Goldberg
  • Selim Unlu
  • Thomas Bifano
  • Yang Lu

Organizations

  • Boston University

Tags

Communities of Interest

  • Advanced Electronics
  • Air Platforms
  • Biomedical

DTIC Thesaurus Topics

  • Adaptive Optics
  • Air Force Research Laboratories
  • Circuits
  • Deformable Mirrors
  • Detectors
  • Geometry
  • Integrated Circuits
  • Materials
  • Microscopes
  • Microscopy
  • Mirrors
  • Numerical Aperture
  • Optics
  • Ray Tracing
  • Refraction
  • Refractive Index
  • Shape

Fields of Study

  • Physics

Readers

  • Optical Physics and Photonics.
  • Thin Film Deposition Science.