Effects on Ferroelectric Thin-Film Stacks and Devices for Piezoelectric MEMS Applications at Varied Total Ionizing Dose (TID)

Abstract

Lead zirconate titanate (PZT) based thin films play a key role in a wide variety of applications due to its ferroelectric, piezoelectric, and pyroelectric properties. This work provides information on the effects of 60Co radiation at different total ionization doses (TID) on theferroelectric, dielectric, and piezoelectric properties of PZT PiezoMEMS actuator devices with two different top electrodes. Overall, the devices with IrO2 top electrode were less impacted by the irradiation compared to the Pt top electrode devices.

Open PDF

Document Details

Document Type
Technical Report
Publication Date
Mar 01, 2017
Accession Number
AD1041981

Entities

People

  • Conrad Callaway
  • Cory D. Cress
  • Evan R. Glaser
  • Hanhan Zhou
  • Jacob L. Jones
  • Jonathan E. Guerrier
  • Manuel Rivas
  • Nazanin Bassiri-Gharb
  • Ronald G. Polcawich
  • Ryan Q. Rudy
  • Steven J. Brewer

Organizations

  • United States Army Research Laboratory

Tags

Communities of Interest

  • Advanced Electronics
  • Space

DTIC Thesaurus Topics

  • Artificial Satellites
  • Domain Walls
  • Engineering
  • Failure Mode And Effect Analysis
  • Films
  • Lead Zirconate Titanates
  • Materials
  • Materials Science
  • Micro-Machines
  • Microelectromechanical Systems
  • Military Research
  • Picosatellites
  • Radiation
  • Radiation Effects
  • Small Satellites
  • Thin Films

Readers

  • Materials Science and Engineering.
  • Nuclear and Radiation Engineering.