Chip-Scale, Ultra-Sensitive Opto-Mechanical Acceleration and Force Sensors
Abstract
Our efforts within the DARPA/ARO QuASAR program are focused on developing chip-scale optomechanical (OM) inertial sensors. Our approach involves the use of nanoscale photonic crystal optical resonators for sensitive optical read-out of mechanical motion, and nanoscale tethers for low-mechanical-dissipation anchoring of the mechanical proof mass. Our primary program goal was to develop an optomechanical accelerometer with bandwidth of 10kHz and noise equivalent acceleration (NEA) less than 100 nano-gee/sqrt(Hz) [gee=10m/s2]. We also explored the realization of OM gyros based upon similar optomechanical structures.
Document Details
- Document Type
- Technical Report
- Publication Date
- Dec 01, 2017
- Accession Number
- AD1050685
Entities
People
- Oskar J. Painter
Organizations
- California Institute of Technology