Stage-Rocked Electron Channeling for Crystal Orientation Mapping (Postprint)

Abstract

Microstructural analysis by crystal orientation mapping of bulk functional materials is an essential and routine operation in the engineering of material properties. Far and away the most successfully employed technique, Electron Backscattered Diffraction (EBSD), provides high spatial resolution information at the cost of limited angular resolution and a distorted imaging condition. In this work, we demonstrate a stage-rocked electron channeling approach as a low-cost orientation mapping alternative to EBSD. This is accomplished by automated electron channeling contrast imaging (ECCI) as the microscope stage physically tilts/rotates a sample through a reduced hemisphere of orientations followed by computational reconstruction of electron channeling patterns (ECP). Referred to as Orientation Mapping by Electron Channeling (OMEC), our method offers advantages in terms of local defect analysis, as it combines the advantages of selected area ECP (SACP) and ECCI. We also illustrate dynamic or adaptive sampling schemes to increase the throughput of the technique. Finally, we discuss the implications for sample analysis in which large 3D maps of ECCI images can be routinely constructed of challenging crystalline samples.

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Document Details

Document Type
Technical Report
Publication Date
Mar 26, 2018
Accession Number
AD1051080

Entities

People

  • Benjamin D Myers
  • Jann Grovogui
  • Karl A. Hujsak
  • Vinayak P. Dravid

Organizations

  • Northwestern University

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Acquisition
  • Air Force
  • Air Force Research Laboratories
  • Contrast
  • Crystal Lattices
  • Crystals
  • Data Sets
  • Detectors
  • Diffraction
  • Materials
  • Materials Science
  • Measurement
  • Microscopes
  • Optical Properties
  • Orientation (Direction)
  • Three Dimensional
  • Two Dimensional

Readers

  • Image Processing and Computer Vision.
  • Materials Science and Engineering.

Technology Areas

  • Microelectronics