Mems: Platform for Large-Scale Integrated Vacuum Electronic Circuits
Abstract
The objective of the LIVEC advanced study project was to develop a platform for large-scale integrated vacuum electronic circuits (LIVEC), which overcomes limitations inherent to vertical emission devices, achieves long-term reliability, and enables revolutionary scales of vacuum device circuit integration. Vacuum devices are preferred to solid-state for applications requiring radiation stability, a wide range in operating temperature, or high power at high frequency.
Document Details
- Document Type
- Technical Report
- Publication Date
- Mar 20, 2017
- Accession Number
- AD1051283
Entities
People
- Charles B Parker
- Erich Radauscher
- Jeffrey T Glass
- Kristin H. Gilchrist
Organizations
- RTI International