Acquisition of Cleanroom Research Equipment to Support Ongoing DoD Programs at ASU

Abstract

Nanofabrication equipment was purchased under this DURIP program. The AS-One 150 Rapid Thermal Processing (RTP), greatly improved the material and device processing capability in many DoD areas of research as well as ongoing student training and education. The RTP tool benefits a large number of users at Arizona State University, where the research ranges from post-Si nanoelectronic devices like III-V transistors and emerging non-volatile memory, HEMTs, MEMS based sensors, and optoelectronic devices such as LEDs, solar cells, and lasers. This tool allows the development innovative fabrication methods, novel device structures, and sustainable research concepts beneficial to many DoD applications.

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Document Details

Document Type
Technical Report
Publication Date
Dec 12, 2017
Accession Number
AD1051346

Entities

People

  • S. R. Johnson
  • Yong-hang Zhang

Organizations

  • Arizona State University

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Abstracts
  • Acquisition
  • Communication Systems
  • Crystal Lattices
  • Department Of Defense
  • Education
  • Fabrication
  • High Temperature
  • Homeland Security
  • Materials
  • Military Research
  • Optoelectronic Devices
  • Semiconductors
  • Solar Cells
  • Solid State Electronics
  • Students
  • Vacuum

Readers

  • Integrated Circuit Design and Technology.
  • Research Science/Academic Research

Technology Areas

  • Directed Energy
  • Microelectronics