Acquisition of an Advanced Mask Aligner and a Spin Coater Unit for Research at Micro and Nanoscale for Energy Harvesting and Nanoelectronics at Alabama A and M University
Abstract
The objective of this project is to acquire a state-of-the-art mask aligner system and a spin coater unit to enable researchers at the Alabama A and M University (AAMU) to fabricate the micro- and nanoscales devices. An advanced SUSS MA6 Gen4 Pro manual mask aligner, a CEE Model 200CBX spin/bake unit, and a Venus50XL-HF bench-top plasma cleaning/etching system have been purchased with the DoD/ARO funding and installed in the Clean Room in the Engineering building at the Alabama A and M University. The project has been completed successfully as proposed. After the project was awarded by ARO in August 2016, we immediately contacted the Suss MicroTec Company and the Brewer Science Company which were proposed as the manufacturers of the two systems in the original proposal, and ordered the SUSS MA6 Gen4 Promanual mask aligner, the newest model of Suss MA6, and the CEE Model 200CBX spin/bakeunit as proposed. Because we received an education discount for the mask aligner from the SussMicroTec Company, we had a surplus funding of about $20,000 for purchasing a bench-top plasma cleaning/etching system, which is an important instrument in the fabrication of micro and nanoscale devices and was lacking in our Clean Room. After the approval of the ARO Program Managers, a Venus50XL-HF bench-top plasma cleaning/etching system was ordered from the Plasma Etch Company. The purchase order for purchasing the mask aligner was issued to the Suss MicroTec Company by AAMU in October 2016. The system was then manufactured by the Suss MicroTec Company, and was received by AAMU in February 2017. The installation of the system in the AAMU-EE Clean Room was completed in March 2017, and the start up of the system and operation training were done by the engineer from the Suss MicroTec Company in March 2017. The purchase order for purchasing the CEE Model 200CBX spin/bake unit was issued to the Brewer Science Company by AAMU in October 2016.
Document Details
- Document Type
- Technical Report
- Publication Date
- Nov 28, 2017
- Accession Number
- AD1052118
Entities
People
- Kaveh Heidary
- Satilmis Budak
- Zhigang Xiao
Organizations
- Alabama A & M College