Thermodynamic Stability of the Q-2 DEG at the Oxide/Oxide Interface under Extreme Thermomechanical Conditions

Abstract

This was a very successful project that culminated in important discoveries, supported seven Ph.D. students and resulted in over fifty publications. The main focus of the study was the two-dimensional electron gas (2DEG) at the interface of oxides with oxygen-deficient SrTiO3 (STO). We demonstrated that at elevated temperature in high vacuum many metals scavenge oxygen from STO. This led to the discovery of large magnetoresistance in the 2DEG at the STO/EuO interface with possible applications in spintronics. Of practical importance is our development of atomic layer deposition (ALD) of several transition metal oxides(TMOs) and their integration on semiconductors. The lower thermal budget of ALD opens a way of integrating functionality of TMOs in the back end process.

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Document Details

Document Type
Technical Report
Publication Date
Aug 14, 2018
Accession Number
AD1058295

Entities

People

  • Alexander A Demkov

Organizations

  • University of Texas at Austin

Tags

DTIC Thesaurus Topics

  • Air Force Research Laboratories
  • Chemical Stability
  • Chemistry
  • Electrical Properties
  • Electron Gas
  • Electron Microscopy
  • Electrons
  • Field Effect Transistors
  • Heterojunctions
  • Metal Oxides
  • Optics
  • Photonics
  • Quantum Wells
  • Semiconductor Devices
  • Semiconductors
  • Transition Metals
  • Two Dimensional

Fields of Study

  • Physics

Readers

  • Reinforced Composite Materials
  • Technical Research and Report Writing.
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene