Two-Step Etch Process for Fabrication of III-V Nanolasers

Abstract

In this project, we sought to better optimize and understand the two-step etch process for creating GaN-based nanowires which are of interest for nanolasers and other applications. Additionally, we also sought to explore whether an analogous two-step etch approach, could be feasible and developed for traditional III-V semiconductors (e.g. GaAs-based), leading to a top-down process for creating III-V nanowire lasers.

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Document Details

Document Type
Technical Report
Publication Date
Feb 27, 2017
Accession Number
AD1058842

Entities

People

  • Ganesh Balakrishnan

Organizations

  • University of New Mexico

Tags

DTIC Thesaurus Topics

  • Aspect Ratio
  • Crystal Structure
  • Crystals
  • Department Of Defense
  • Electron Beam Lithography
  • Electronic Materials
  • Engineering
  • Etching
  • Fabrication
  • Geometry
  • Materials
  • Materials Science
  • Mathematics
  • Nanostructures
  • Semiconductors
  • Students
  • Vapor Phases

Fields of Study

  • Materials science

Readers

  • Nanoscale Plasmonic Nanotechnology
  • Semiconductor Device Technology

Technology Areas

  • Directed Energy
  • Microelectronics