Lead Zirconate Titanate (PZT) Microelectromechanical System (MEMS) HF/VHF Resonators and Filters for 50-ohm Termination

Abstract

This report covers lead zirconate titanate (PZT) resonators and filters in the high-frequency and very-high-frequency bands. Design of resonators for 50-ohm termination are described, resulting in resonators with insertion loss below 1 dB that are orders of magnitude smaller than similar commercial parts at this frequency. Design of monolithically integrated flexure and extension resonators with varied coupling and quality factors are presented with cross-wafer uniformity data for extensional devices.

Open PDF

Document Details

Document Type
Technical Report
Publication Date
Sep 01, 2018
Accession Number
AD1060419

Entities

People

  • J M Puder
  • Jeffrey S. Pulskamp
  • M Breen
  • Ronald G. Polcawich
  • Ryan Q. Rudy
  • S. Y. Li
  • Sarah S. Bedair

Organizations

  • United States Army Research Laboratory

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Bandwidth
  • Fabrication
  • Frequency
  • Frequency Bands
  • Insertion Loss
  • Intermediate Frequencies
  • Lead Zirconate Titanates
  • Losses
  • Micro-Machines
  • Microelectromechanical Systems
  • Piezoceramics
  • Radio Frequency
  • Radio Frequency Filters
  • Resonators
  • Surface Acoustic Waves
  • Transducers
  • Very High Frequency

Fields of Study

  • Physics

Readers

  • Integrated Circuit Design and Technology.
  • Materials Science and Engineering.
  • Phased Array Antenna Design.

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems