Acquisition of Multi-functional Nanoprobe Station-based Measurement System for Comprehensive In Situ Materials Characterization and Measurement in SEM

Abstract

Major Goals: 1. Acquire and set up a multi-functional nanoprobe station-based measurement (NPSM) system in a scanning electron microscope (SEM). This includes designing of the system, purchasing of multiple instruments and components from different manufacturers and vendors, and machining of required parts. 2. Assemble, install, and test the NPSM system to realize comprehensive functions of in situ materials characterization (structural and compositional) and property measurements (electrical, optical, and mechanical) in the SEM. 3. Provide user training for basic operations and advanced structure characterization and property measurements. 4. Include the NPSM system into a shared user facility, supporting research programs in areas of interest to DoD and education programs in STEM fields. 5. Enhance the STEM curricula at UNC Charlotte in materials characterization and measurements. 6. Enhance research involvement of undergraduate, women, minority students, and other underrepresented groups into research. 7. Provide proactive programs to ensure broader impacts to K-12 students, including high school teachers. Accomplishments: 1. Goal #1 was accomplished. The system was designed based on the requirements of proposed NPSM system. The design was adjusted during the installation to fit the actual dimension of the SEM chamber. Major instruments and components have been purchased and machined. Additional parts might need to purchase during the testing stage of the system. 2. The assembling and installation in Goal #2 was accomplished. Most system testing was also completed.

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Document Details

Document Type
Technical Report
Publication Date
Apr 30, 2018
Accession Number
AD1068605

Entities

People

  • Haitao Zhang
  • Michael A. Fiddy
  • Michael G Walter
  • Qiuming Wei
  • Stuart T. Smith
  • Ting Xu
  • Tsing-Hua Her
  • Yong Zhang

Organizations

  • University of North Carolina at Chapel Hill

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Chemical Vapor Deposition
  • Education
  • Electrical Measurement
  • Electron Beams
  • Electron Microscopes
  • Electrons
  • Fabrication
  • Instructions
  • Materials
  • Measurement
  • Microscopes
  • Microscopy
  • Nanostructures
  • Optical Fibers
  • Schools
  • Students
  • Training

Readers

  • Research Science/Academic Research
  • Software Engineering

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems