DNA-based Nanofabrication of Functional Nanoscale Devices
Abstract
The objective of this project is to develop a toolkit to enable DNA-based multi-step nanofabrication of functional semiconductor nano-electronic devices. The research will address two major challenges that are central to the DNA-based nano-manufacturing in semiconductor industry: (1) programmable, self-aligned deposition of DNA templates for multi-step nanofabrication; and (2) site-specific doping of Si and other inorganic semiconductor substrate using a DNA template. If successful, this project will demonstrate the fabrication of Si transistors using DNA lithography as the patterning tool.
Document Details
- Document Type
- Technical Report
- Publication Date
- Mar 04, 2019
- Accession Number
- AD1070407
Entities
People
- Haitao Liu
Organizations
- University of Pittsburgh