Fast, Full Chip Image Stitching of Nanoscale Integrated Circuits
Abstract
The rapid progression of semiconductor technology has significantly impacted the ability to examine and analyze complex integrated circuits (ICs). Small device feature sizes, combined with large die sizes, add a heavy processing burden that severely limits our timely ability to perform defect validation and anti-tampering analysis at full scale. In this paper, we describe the algorithmic steps taken in the processing pipeline to quickly create a global image database of an entire advanced IC. We focused specifically on the image alignment and stitching algorithms necessary to support a combined field-of-view of a given layer of a die. We describe key algorithmic challenges such as contextual semantics that limits the robustness of the alignment algorithm. We also describe the use of database indexing to manage and traverse the enormousamounts of data.
Document Details
- Document Type
- Technical Report
- Publication Date
- Mar 25, 2019
- Accession Number
- AD1075372
Entities
People
- Christopher G. Ferri
- David Stoker
- David W Taylor
- David Weaver
- David Zhang
- Dustin Kobs
- Erik Matlin
- Gary Gan
- Gooitzen Van Der Wal
- Jane Asmuth
- Joe Zhang
- Jordan Furlong
- Michael Dibattista
- Michael Piacentino
- Naveen Marri
- Phil Miller
- Robert Chivas
- Scott Silverman
- Sek Chai
- Thomas Harper
Organizations
- SRI International