Probing Ion Radiation Effects in Si Crystal by 3D Integrated Resonating Thin Diaphragms

Abstract

We report on experimental study and analysis of the effects of energetic heavy ion radiation upon mechanical properties of single-crystal silicon (Si) diaphragm resonators, by exploiting a novel 3D scheme of using a vertical stack of 5micromachined vibrating Si diaphragms exposed to energetic oxygen ions. We have observed different frequency redshifts indifferent layers in the stack, which can be explained by different types and magnitudes of damage induced by the oxygen ions radiation. The integration design not only scientifically enables probing different radiation effects in a 3D fashion, but also economically evades very expensive, repetitive tests on individual devices, which provides a powerful tool for the investigation of radiation effects on MEMS and other micro/nanoscale systems.

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Document Details

Document Type
Technical Report
Publication Date
Mar 25, 2019
Accession Number
AD1075820

Entities

People

  • Hailong Chen
  • Hao Jia
  • Michael L. Alles
  • Michael W. McCurdy
  • Peter Hung
  • Philip X. -l. Feng
  • Robert A. Reed
  • Ronald D. Schrimpf

Organizations

  • Case Western Reserve University

Tags

Communities of Interest

  • Advanced Electronics
  • Counter WMD
  • Cyber
  • Space

DTIC Thesaurus Topics

  • Artificial Intelligence
  • Bulk Materials
  • Computer Science
  • Crystals
  • Detection
  • Electrical Engineering
  • Engineering
  • Frequency
  • Frequency Shift
  • Materials
  • Microelectromechanical Systems
  • Radiation
  • Radiation Effects
  • Resonance
  • Resonators
  • Semiconductors
  • Single Crystals

Fields of Study

  • Physics

Readers

  • Nanofabrication and Microfabrication.
  • Nanoscale Plasmonic Nanotechnology
  • Pulsed Power and Plasma Physics.