Programmable Photolithographic Masks for Novel Trust and Assurance Approaches

Abstract

As economic and technical motivations drive advanced node integrated circuit (IC) complexity to 100s of millions to billions of transistors per IC, the ability to tailor or modify an IC post design and fabrication becomes increasingly important. At the same time, adversaries are becoming increasingly skilled at compromising ICs, driving the need for mitigations such as obfuscation and individual IC authentication and authorization. Existing approaches can utilize volatile and/or nonvolatile memory, combined with embedded logic, but such approaches have limitations. In this paper a novel on the fly programmable photolithographic mask structure and associated manufacturing method is described to implement an approach suitable for nondisruptive integration into high volume manufacturing environments. With this new ability to tailor each individual IC during semiconductor manufacturing, an entire new class of IC designs is possible through customization of millions of dense embedded hidden non-differentiated on chip structures, on an individual IC basis. Novel trust and assurance approaches, to combat counterfeiting and to thwart nation state adversaries, through the implementation of new obfuscation, authentication keying, feature tailoring, functionality modification, and proof of provenance, are possible with this new technology.

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Document Details

Document Type
Technical Report
Publication Date
Mar 25, 2019
Accession Number
AD1076112

Entities

People

  • Alok Vaid
  • Ezra Hall
  • Jed Rankin

Tags

Communities of Interest

  • Advanced Electronics
  • Materials and Manufacturing Processes

DTIC Thesaurus Topics

  • Attenuation
  • Computer Programming
  • Dynamic Programming
  • Engineering
  • Fabrication
  • Focal Planes
  • Light Transmission
  • Liquid Crystal Displays
  • Liquid Crystals
  • Lithography
  • Manufacturing
  • Modulators
  • Optical Modulators
  • Particle Size
  • Radiation
  • Radiation Attenuation
  • Semiconductor Manufacturing

Readers

  • Cybersecurity.
  • Distributed Systems and Data Platform Development
  • Integrated Circuit Design and Technology.

Technology Areas

  • Microelectronics