Wafer Bonding for Hybrid Photonic Integration Research
Abstract
The primary objective of this proposal is to create the wafer bonding capability at Clemson University to support several ongoing photonic integration related projects supported by the DoD. This new capability will also enable many other research projects in photonics and electronics and greatly enhance research-orientated education of undergraduate and graduate students.
Document Details
- Document Type
- Technical Report
- Publication Date
- Apr 22, 2019
- Accession Number
- AD1082999
Entities
People
- Zhu Lin
Organizations
- Clemson University