Multiobjective Optimization of Deflection and Curvature Radius in a Microelectromechanical System (MEMS) Bimorph Cantilever Actuator Driven by Shape Memory Alloy (SMA) Thin-Film Phase Change

Abstract

At the microscale, shape memory alloy (SMA) microelectromechanical system (MEMS) bimorph actuators offer great potential based on their inherently high work density. An optimization problem relating to the deflection and curvature based on shape-memory MEMS bimorph was identified, formulated, and solved. Thicknesses of the SU-8 photoresist and nickel-titanium alloy (NiTi) were identified that yielded maximum deflections and curvature radius based on a relationship among individual layer thicknesses, elastic modulus, and cantilever length. This model should serve as a guideline for optimal NiTi and SU-8 thicknesses to drive large deflections and curvature radius that are most suitable for microrobotic actuation, micromirrors, micropumps, and microgrippers.

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Document Details

Document Type
Technical Report
Publication Date
Jan 29, 2020
Accession Number
AD1090611

Entities

People

  • Cory R. Knick
  • Gaurav Kumar
  • Han Zhou
  • Paul Monaghan

Organizations

  • United States Army Research Laboratory

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Actuators
  • Alloys
  • Curvature
  • Curve Fitting
  • Deflection
  • Films
  • Literature Surveys
  • Materials
  • Microelectromechanical Systems
  • Modulus Of Elasticity
  • Multiobjective Optimization
  • Optimization
  • Shape
  • Shape Memory Alloys
  • Thickness
  • Thin Films
  • Titanium Alloys

Fields of Study

  • Physics

Readers

  • Marine Propulsion Engineering and Naval Architecture
  • Nanofabrication and Microfabrication.
  • Structural Dynamics.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene
  • Microelectronics - Microelectromechanical Systems