Radiation Survivability of MEMS Microelectronic Circuits with Carbon Nanotube Field Emitters

Abstract

The objective of this program was to determine the effects of radiation on MEMS vacuum microelectronic devices with integrated carbon nanotube field emitters. We do observe some small effects of radiation on the field emission properties of CNTs and integrated MEMS vacuum microelectronic devices. However, the residual gas in the vacuum chamber adsorbing and desorbing from the surface of the CNTs has a much larger effect on field emission and device performance than the radiation.

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Document Details

Document Type
Technical Report
Publication Date
Dec 31, 2019
Accession Number
AD1092951

Entities

People

  • Charles W. Parker
  • Jason J Amsden
  • Jeffrey T Glass
  • Kristin Gilchrist
  • Tasso Von Windheim

Organizations

  • Duke University
  • RTI International

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Carbon Nanotubes
  • Electron Emission
  • Fabrication
  • Field Emission
  • Gamma Rays
  • Graphene
  • Ionizing Radiation
  • Jet Propulsion
  • Materials
  • Materials Processing
  • Materials Science
  • Measurement
  • Microelectromechanical Systems
  • Micromachining
  • Radiation Effects
  • Raman Spectra
  • Semiconductors

Fields of Study

  • Physics

Readers

  • Nanocomposite Materials Science
  • Nanofabrication and Microfabrication.
  • Pulsed Power and Plasma Physics.

Technology Areas

  • Microelectronics