The Structure and Properties of Amorphous Indium Oxide
Abstract
A series of In2O3 thin films, ranging from X-ray diffraction amorphous to highly crystalline, were grown on amorphous silica substrates using pulsed laser deposition by varying the film growth temperature. The amorphous-to-crystalline transition and the structure of amorphous In2O3 were investigated by grazing angle X-ray diffraction (GIXRD), Hall transport measurement, high resolution transmission electron microscopy (HRTEM), electron diffraction, extended X-ray absorption fine structure (EXAFS), and ab initio molecular dynamics (MD) liquid-quench simulation. On the basis of excellent agreement between the EXAFS and MD results, a model of the amorphous oxide structure as a network of InOx polyhedra was constructed. Mechanisms for the transport properties observed in the crystalline, amorphous-to-crystalline, and amorphous deposition regions are presented, highlighting a unique structureproperty relationship.
Document Details
- Document Type
- Technical Report
- Publication Date
- Sep 02, 2014
- Accession Number
- AD1094083
Entities
People
- Arturo Ponce
- D. B. Buchholz
- Diego Alducin
- Julia E. Medvedeva
- Miguel José-yacaman
- Qing Ma
- Rabi Khanal
- Robert P. Chang
Organizations
- University of Texas at San Antonio