Dynamic Micromechanical Fabry-Perot Cavity Sensors Fabricated by Multiphoton Absorption Onto Optical Fiber Tips

Abstract

This research leveraged two-photon polymerization microfabrication to integrate dynamic mechanical components with Fabry-Perot resonators onto the ends of low-loss optical fibers to prototype 3 micro-optic devices. The first device featured a multi-positional mirror that enabled thin-film deposition onto cavities of any length with mirrors of significant curvature, for refractive index sensing. The second device combined an FP cavity with a spring body featuring easily scalable stiffness for pressure sensing. The third device presented a high-speed rotating micro-anemometer for measuring a wide range of gas flows. All devices represent a significant reduction in size and weight over commercially available devices.

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Document Details

Document Type
Technical Report
Publication Date
Mar 26, 2020
Accession Number
AD1096039

Entities

People

  • Jeremiah C. Williams

Organizations

  • Air Force Institute of Technology

Tags

Communities of Interest

  • Advanced Electronics
  • Ground and Sea Platforms
  • Sensors

DTIC Thesaurus Topics

  • Accuracy
  • Additive Manufacturing
  • Air Force
  • Aircrafts
  • Barometric Pressure
  • Chemical Vapor Deposition
  • Climate Change
  • Complementary Metal-Oxide Semiconductors
  • Computer-Aided Design
  • Fabrication
  • Lasers
  • Manufacturing
  • Materials Science
  • Measurement
  • Mechanical Properties
  • Optical Fibers
  • Unmanned Aerial Vehicles

Fields of Study

  • Physics

Readers

  • Integrated Circuit Design and Technology.
  • Optical Physics and Photonics.