Hierarchical Laser Patterning of Indium Tin Oxide Thin Films

Abstract

Multiscale laser patterning of indium tin oxide thin films using the combination of direct laser interference patterning (DLIP) and laser induced periodic surface structuring (LIPSS) was studied. By balancing DLIP and LIPSS, structures in an ordered hierarchical pattern consisting of 75 nm LIPSS, 650 nm DLIP, and 50 mu m laser spot size were demonstrated. The effects of laser fluence on the DLIP, LIPSS, and grain growth are discussed. The anisotropic conductance due to LIPSS was shown to exceed 50,000:1. Infrared reflectance measurements indicated that the anisotropy was uniform across the laser patterned samples.

Open PDF

Document Details

Document Type
Technical Report
Publication Date
Jun 20, 2019
Accession Number
AD1096863

Entities

People

  • Alberto Piqué
  • Heungsoo Kim
  • Kristin Charipar
  • Nicholas Charipar
  • Raymond C. Auyeung

Organizations

  • United States Naval Research Laboratory

Tags

Communities of Interest

  • Advanced Electronics
  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Angle Of Incidence
  • Electric Fields
  • Electrical Conductivity
  • Electrical Measurement
  • Electrical Properties
  • Grain Growth
  • Laser Beams
  • Lasers
  • Materials
  • Materials Science
  • Measurement
  • Optical Materials
  • Optical Properties
  • Oxide Films
  • Surface Roughness
  • Thin Films
  • Waveplates

Fields of Study

  • Materials science

Readers

  • Nanofabrication and Microfabrication.
  • Optical Physics and Photonics.
  • Thin Film Deposition Science.

Technology Areas

  • Directed Energy
  • Directed Energy - Pulsed-Laser Deposition