Development of a Built-In, Metal-Air, Hydrogen Nanobattery: FY18 Energy Technical Investment Program
Abstract
High-capacity batteries that are ubiquitous in consumer electronics contain rigid and thick substrates to accommodate high temperature material processing, bulky packaging to contain liquid electrolytes, and generally cannot be scaled to micron scale dimensions. Even thin-film solid-state lithium ion batteries require the use of ~100 m thick support material composed of silicon or metal, which limits the effective energy density and ability to scale to sub-micron dimensions. As a result, the realization of micro- or nanoscale batteries that can provide localized power distribution within an integrated circuit (IC) or low-power sensors has remained impractical. As an alternative, we have developed a hydrogen nanobattery composed of materials that can easily be scaled to nanometer-scale device thickness, can be patterned to micron- or nanometer-scale lateral dimensions, and can be deposited at room temperature for integration with thin polymer support substrates or with back-end-of-line (BEOL) microelectronics processing.
Document Details
- Document Type
- Technical Report
- Publication Date
- Dec 07, 2018
- Accession Number
- AD1098927
Entities
People
- A. C. Weathers
- A. J. Tan
- G. Beach
- R. O. Ouedraogo
- S. Sheffels
Organizations
- MIT Lincoln Laboratory