Developing a Hybrid SThM-SEM System with High Spatiotemporal Resolutin for Transient Thermal Characterization of Electronic Materials and Devices

Abstract

The electron beam (e-beam) in the scanning electron microscopy (SEM) provides an appealing mobile heating source for thermal metrology with spatial resolution of ~ 1 nm, but the lack of systematic quantification of the e-beam heating power limits such application development. We demonstrated the capability of using e-beam (SEM) as a quantitative heating source from both experimental and theoretical approaches, and further e-beam based thermal conductivity measurement promotes this heating source characterization. This provides a foundation to adopt e-beam to develop high resolution thermal probing techniques in SEM in addition to its high- resolution imaging capability.

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Document Details

Document Type
Technical Report
Publication Date
Aug 15, 2020
Accession Number
AD1107166

Entities

People

  • Yanbao Ma

Organizations

  • University of California

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Ceramic Materials
  • Chemical Vapor Deposition
  • Conductivity
  • Electron Beams
  • Electron Microscopy
  • Energy
  • Energy Transfer
  • Heat Transfer
  • Materials
  • Materials Science
  • Measurement
  • Microelectromechanical Systems
  • Microscopy
  • Monte Carlo Method
  • Scanning Electron Microscopy
  • Thermal Conductivity
  • Two Dimensional

Fields of Study

  • Physics

Readers

  • Distributed Systems and Data Platform Development
  • Pulsed Power and Plasma Physics.
  • Quantum Dot Semiconductor Device Photonics and Graphene Optoelectronic Materials and THz Physics.

Technology Areas

  • Directed Energy
  • Microelectronics