The Study of Radiation Effects in Emerging Micro and Nano Electro Mechanical Systems (M and NEMs)

Abstract

The potential of micro and nano electromechanical systems (M and NEMS) has expanded due to advances in materials and fabrication processes. A wide variety of materials are now being pursued and deployed for M and NEMS including silicon carbide (SiC), III-V materials, thinfilm piezoelectric and ferroelectric, electro-optical and 2D atomic crystals such as graphene, hexagonal boron nitride (h-BN), and molybdenum disulfide (MoS2). The miniaturization, functionality and low-power operation offered by these types of devices are attractive for many application areas including physical sciences, medical, space and military uses, where exposure to radiation is a reliability consideration. Understanding the impact of radiation on these materials and devices is necessary for applications in radiation environments.

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Document Details

Document Type
Technical Report
Publication Date
Dec 09, 2016
Accession Number
AD1111241

Entities

People

  • Alex Zettl
  • Brian D Homeijer
  • Bruce Alphenaar
  • Charles N. Arutt
  • Cory D. Cress
  • Evan R. Glaser
  • Huiqi Gong
  • J. L. Davidson
  • Jacob L. Jones
  • Ji-Tzuoh Lin
  • Juejun Hu
  • Kevin Walsh
  • Kirill Bolotin
  • Louis Hutin
  • Michael L. Alles
  • Mo Li
  • Nazanin Bassiri-Gharb
  • Philip X Feng
  • Pranoy Deb Shurva
  • Qingyang Du
  • Robert A. Reed
  • Robert A. Weller
  • Robert M. Proie
  • Ronald D. Schrimpf
  • Ronald G. Polcawich
  • Ryan Nicholl
  • Shamus McNamara
  • Thang Toan Pham
  • Thomas Ernst
  • Wenjun Liao

Organizations

  • United States Naval Research Laboratory

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Aging (Materials)
  • Ceramic Materials
  • Fabrication
  • Gamma Rays
  • Ionizing Radiation
  • Jet Propulsion
  • Logic Gates
  • Material Degradation Processes
  • Materials
  • Materials Laboratories
  • Materials Processing
  • Materials Science
  • Mechanical Properties
  • Microelectromechanical Systems
  • Modulus Of Elasticity
  • Silicon Carbide
  • Transducers

Fields of Study

  • Physics

Readers

  • Integrated Circuit Design and Technology.
  • Quantum Dot Semiconductor Device Photonics and Graphene Optoelectronic Materials and THz Physics.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene
  • Microelectronics - Microelectromechanical Systems
  • Space