Nanoscale Electronics Development and Fabrication (RAPIDFAB)
Abstract
The objective of this effort was to provide nanoscale electronic device design, layout, fabrication and testing services for AFRL projects and programs. This effort leveraged multiple ongoing efforts between SUNY Polytechnic Institute (SUNY Poly) and AFRL, including, but not limited to CMOS and resistive memory (ReRAM, memristor) platforms. The ultimate goal was delivery of cutting-edge nanoelectronic devices/systems and performance data to AFRL for support of R and D programs. The major outcomes of this effort include development of novel memristive materials/stacks, extending 300mm wafer based integration of CMOS/ReRAM to the far back end of the line (BEOL), characterization of CMOS/ReRAM device performance, and finally, evaluation of the impact of device variability and methods to mitigate the effects of such variability.
Document Details
- Document Type
- Technical Report
- Publication Date
- Apr 21, 2021
- Accession Number
- AD1128496
Entities
People
- Nathaniel C Cady
Organizations
- SUNY Polytechnic Institute