Sputtered Platinum (Pt) Electrode Development for Lead Zirconate Titanate (PZT) Piezoelectric Microelectromechanical Systems (MEMS) Devices

Abstract

The AJA ATC 2200 sputtering tool in the US Army Combat Capabilities Development Command Army Research Laboratory's cleanroom provides an option for platinum (Pt) 111 electrode deposition. Bottom electrodes deposited at 500-800 deg C and 800- 1000 thickness were characterized by four-point probe, X-ray diffraction (XRD), and atomic force microscopy. The Pt 111 had a minimum 222 rocking curve full width at half maximum (FWHM) of 1.6 0.1 at 600 C.

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Document Details

Document Type
Technical Report
Publication Date
Apr 13, 2021
Accession Number
AD1131822

Entities

People

  • Daniel M. Potrepka
  • Glen R. Fox
  • Jeffrey S. Pulskamp
  • Matthew L. Chin
  • Robert R. Benoit
  • Ryan Q. Rudy

Organizations

  • United States Army

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Detectors
  • Dielectric Permittivity
  • Diffraction
  • Electric Fields
  • Electrical Measurement
  • Electrical Properties
  • Electromagnetic Radiation
  • Films
  • Gas Flow
  • Generators
  • Internet Of Things
  • Lead Zirconate Titanates
  • Materials
  • Measurement
  • Metals
  • Micro-Machines
  • Microelectromechanical Systems
  • Military Research
  • Optical Properties
  • Physical Properties
  • Resistance
  • Surface Roughness
  • Thickness
  • Thin Films
  • X Rays
  • X-Ray Diffraction

Fields of Study

  • Materials science

Readers

  • Electrochemical Engineering/ Fuel Cell Technologies
  • Materials Science and Engineering.
  • Nanofabrication and Microfabrication.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene
  • Microelectronics - Microelectromechanical Systems