Investigation of Thermoelastic Damping in Microelectromechanical System (MEMS) Quadruple-Mass Gyroscope (QMG) Designs

Abstract

Thermoelastic damping (TED) is an intrinsic damping source in microelectromechanical system resonators that limits the quality factor (Q). In this report, we document the process developed to model TED in quadruple-mass gyroscope (QMG) designs using COMSOL Multiphysics software. Modeled QMG TED performance is compared with experimental results and analytical models. Areas with low Q are found in the QMG designs where the anchor springs connect to the shuttles and potential design improvements are explored. The TED modeling process is then applied to a disk resonator gyroscope design and future experiments/modeling for device optimization are discussed.

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Document Details

Document Type
Technical Report
Publication Date
Aug 01, 2021
Accession Number
AD1144809

Entities

People

  • A. Mazzoni
  • Jeff Pulskamp
  • Ryan Knight
  • Ryan Q. Rudy

Organizations

  • Oak Ridge Associated Universities
  • United States Army

Tags

Communities of Interest

  • Advanced Electronics
  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Blood Coagulation Factors
  • Boundaries
  • Coefficients
  • Computer-Aided Design
  • Elastic Properties
  • Energy
  • Fabrication
  • Frequency
  • Global Positioning Systems
  • Heat Capacity
  • Heat Transfer
  • Microelectromechanical Systems
  • Simulations
  • Specific Heat
  • Temperature Coefficients
  • Three Dimensional
  • Two Dimensional

Readers

  • Atmospheric Science/Meteorology
  • Computational Fluid Dynamics (CFD)
  • Inertial Navigation Systems.

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems