Method for Reducing Bias Drift in a Microelectromechanical Systems Sensor

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Document Details

Document Type
Technical Report
Publication Date
Aug 11, 2020
Accession Number
AD1150107

Entities

People

  • Ahmed S. Zaki
  • Christopher Moll
  • John G Miskimins
  • Michael J. Kroger
  • William H. Slater

Organizations

  • Naval Undersea Warfare Center

Tags

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems