Role of Carbon Vacancies on Mechanical Properties of Transition-Metal Carbide Thin Films

Abstract

We developed a reactive sputter-deposition procedure, wherein one can precisely vary the reactive gas partial pressure from ultra-high vacuum (UHV) levels up to a few milliTorr. Through a series of experiments, we demonstrate control over the Ta-C phase (Ta2C to Ta3C2 to TaC) and C concentration by varying the deposition parameters (substrate temperature and reactive gas pressure). In addition, we have carried out detailed mechanical and compositional characterization of refractory high-entropy alloy, VNbTaMoW, developed new insights into the growth kinetics of 2D layered graphene and hBN, and demonstrated the growth of self-organized nanostructures of (VNbTaMoW)N.

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Document Details

Document Type
Technical Report
Publication Date
Oct 19, 2022
Accession Number
AD1184929

Entities

People

  • Suneel Kodambaka

Organizations

  • University of California, Los Angeles

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Air Force
  • Air Force Research Laboratories
  • Ceramic Materials
  • Crystal Structure
  • Films
  • High Temperature
  • High Vacuum
  • Kinetics
  • Materials
  • Materials Laboratories
  • Mechanical Properties
  • Metals
  • Microscopy
  • Partial Pressure
  • Reactive Gases
  • Scientific Research
  • Strain Hardening
  • Thin Films
  • Transition Metals
  • Transitions
  • Two Dimensional
  • Universities

Fields of Study

  • Physics

Readers

  • Nanocomposite Materials Science
  • Powder metallurgy of Titanium alloys.
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene