Efficacy of a FIB and Planar Preparation Technique for Producing TEM Lamella of CLS

Abstract

An unconventional method for creating transmission electron microscopy (TEM) lamella via focused-ion beam (FIB) was evaluated. While the conventional method involves using the FIB to mill and extract a lamella normal to a materials surface, the method tested here involves extracting a lamella in plane with the surface. The benefits of using the unconventional, or planar, method and when it might be used are contrasted with the conventional method. As an example, a TEM-quality lamella is made from a cut and polished bulk sample of calcium lanthanum sulfide using the planar method. Details of the method and parameters used in the procedure, as well as TEM analysis, are discussed.

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Document Details

Document Type
Technical Report
Publication Date
May 01, 2023
Accession Number
AD1201906

Entities

People

  • Samuel G. Hirsch

Organizations

  • United States Army Research Laboratory

Tags

Readers

  • Finite Element Method (FEM) for solving Partial Differential Equations (PDEs)
  • Image Processing and Computer Vision.
  • Powder metallurgy of Titanium alloys.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene