Upgrade of GEN-930 MBE System for Epitaxial Regrowth of Antimonde Photonics Materials
Abstract
Major Goals: The Veeco GEN-930 solid-source MBE system was upgraded with clean cryo shrouds in main reactor, increased pumping capacity in buffer chamber where atomic hydrogen cleaning is performed, and more functional hydrogen delivery system to increase the crystalline quality and improve surface morphology of the epitaxial heterostructures. The major goal was minimization of the material contamination during growth and during critical surface preparation steps. Accomplishments: The funds were utilized to acquire the necessary equipment, services and materials to improve the vacuum quality of the MBE system and perform necessary verification tests. The upgraded MBE will be used to grow device heterostructures to support the following on-going research programs at Stony Brook University, namely: 1. Development of the high power GaSb-based photonic crystal surface emitting lasers - sponsored by US Army Research Office; 2. Development of novel metamorphic heterostructures for long wave infrared optoelectronics - sponsored by US Army Research Office and FLIR Inc; 3. Development of the novel electrically pumped bi-photon emitters for quantum photonic applications - sponsored by US National Science Foundation; 4. Development of the GaAs-based x-ray photodetector arrays for X-ray beam position monitoring.
Document Details
- Document Type
- Technical Report
- Publication Date
- Aug 12, 2021
- Accession Number
- AD1208876
Entities
People
- Gregory A. Belenky
- L. Shterengas
Organizations
- State University of New York