Circuit Editing of Gold Connecting Electrodes Using a Focused Ion Beam Microscope

Abstract

The fabrication of a newly designed acoustic resonator has resulted in some faulty devices due to gold electrodes either being connected or too far apart. This has limited the number of devices available for testing. Fortunately, these devices can be edited with a focused ion beam microscope, making them functional again. This technical note describes the process of editing these gold electrodes through both subtractive and additive means.

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Document Details

Document Type
Technical Report
Publication Date
Sep 25, 2023
Accession Number
AD1211303

Entities

People

  • Jonathan Ligda
  • Mary B. Galanko

Organizations

  • United States Army

Tags

Readers

  • Computer Science/Computer Engineering/Data Science/Digital Signal Processing.
  • Electrochemical Surface Science
  • Optical Physics and Photonics.