Production of Diverse Functional Core/Shell Nanoparticles via Atomic Layer Deposition

Abstract

In this work, we develop rotary particle ALD (pALD) processes for depositing Au on TiN and TiO2 nanoparticles (NPs) for optical applications, and we investigate ZnO ALD infilling of macroscopic porous compacts of Al2O3 NPs. Au pALD produces Au NPs that decorate the surfaces of the TiN and TiO2 particles. We also use rotary pALD to deposit ZnO shells on Al2O3 NPs, and we compare a ZnO-infilled Al2O3 NP compact to a compact formed by pressing pALD-produced core/shell Al2O3/ZnO NPs in order to elucidate the effects of the very long ALD precursor dose times necessary for complete infilling of macroscopic nanoporous solids.

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Document Details

Document Type
Technical Report
Publication Date
May 05, 2024
Accession Number
AD1227832

Entities

People

  • Benjamin L Greenberg

Organizations

  • United States Naval Research Laboratory

Tags

Fields of Study

  • Materials science

Readers

  • Combustion science or combustion engineering.
  • Nanofabrication and Microfabrication.
  • Nanoscale Plasmonic Nanotechnology

Technology Areas

  • Biotechnology