Charge Transport and Polarization Effects in Dielectrics of MSI/LSI Devices.

Abstract

The purpose of the program was to investigate the magnitude and characteristics of the charge transfer and polarization that occur during an ionization pulse in typical oxide dielectrics used in MSI/LSI devices especially those used for passivation and separation of multilevel metalizations.

Document Details

Document Type
Technical Report
Publication Date
Sep 01, 1974
Accession Number
ADA000833

Entities

People

  • Donald P. Snowden
  • Roland E. Leadon

Tags

DTIC Thesaurus Topics

  • Charge Transfer
  • Deionization
  • Dielectrics
  • Ionization
  • Polarization
  • Transport Ships

Fields of Study

  • Physics

Readers

  • Integrated Circuit Design and Technology.
  • Semiconductor Device Technology