Automatic Control System for Microcircuit Production Processes,
Abstract
The article discusses requirements for reliable computer-controlled production of integrated circuits, using electron-beam technology. Such a unit, developed and tested by the Ukranian SSR Academy of Sciences Institute of Cybernetics, is discussed. Illustrations, a block diagram, sample flow sheets and a partial wiring diagram, are presented. More than 400 pattern codes are stored in the computer memory. Duration of processing pulses and the intervals between them are regulated between 2 microsec and 10.2 sec, and the first operating test is said to have given close to 100% reproducibility of the electrical characteristics of integrated circuit components.
Document Details
- Document Type
- Technical Report
- Publication Date
- Aug 12, 1974
- Accession Number
- ADA001490
Entities
People
- G. T. Makarov
- V. M. Glushkov
- V. P. Derkach
Organizations
- United States Army Foreign Science and Technology Center