Charge-Coupled Scanned IR Imaging Sensors
Abstract
A charge-coupled imager sensitive to infrared light up to 3 micrometers has been fabricated and operated. It consists of a linear array of 64 Pd:p-Si Schottky-barrier detectors adjacent to a three-phase charge-coupled shift register. The design has a single level of metallization with gaps. A single transmission gate, when pulsed on, coupled each detector to its associated shift register gate, thereby setting each barrier to a reverse bias determined by the potential applied to the transmission gate. Incident infrared light discharges the individual detectors during the detector exposure time. The charges transferred into the CCD shift register the next time the transmission gate is pulsed are transferred out sequentially by the charge- coupled shift register to produce the video signal. Visible images were sensed directly by illumination of the shift register through the gaps as well as through the unthinned substrate. Infrared images were sensed by the Schottky- barrier detectors illuminated through the (transparent) substrate.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jul 15, 1974
- Accession Number
- ADA003342
Entities
People
- Elliott S. Kohn
- Melvin L. Schultz
Organizations
- Sarnoff Corporation