Waveguides in Lithium Niobate-Tantalate.
Abstract
The authors describe the fabrication of diffused lithium niobate tantalate waveguides and define the conditions under which they form. A broad range of processing conditions exists which leads to thin low loss optical waveguides well suited to the fabrication of electrooptic modulators and switches. These waveguides have two additional attributes which are of potential interest in the area of integrated optics. The first is the relative simplicity of their fabrication, which is readily amenable to volume production techniques. The range of acceptable processing parameters is sufficiently broad and noncritical that a high yield of useful devices is likely. Secondly, the waveguides are well suited to photolithographic masking procedures which will facilitate the fabrication of stripe guides, prisms, gratings and other integrated optic circuit elements.
Document Details
- Document Type
- Technical Report
- Publication Date
- Dec 01, 1974
- Accession Number
- ADA004914
Entities
People
- William Phillips
Organizations
- RCA Corporation