Combined Ellipsometric and Soft X-Ray Spectroscopic Studies of Corrosion Processes on Transparent Materials.
Abstract
It is shown that ellipsometry can be used to non-destructively characterize the contaminant surface film as well as the damaged surface layers on optically transparent materials. The results of ellipsometric measurements on vitreous silica glasses and potassium chloride single crystal specimens subjected to various surface treatments such as mechanical polishing, chemical etching and sputter-cleaning are presented and discussed. A new generalized method has been developed for the evaluation of all the optical parameters of the system: Optically absorbing film on an optically opaque substrate. The method involves the ellipsometric measurements on such a system and the analysis of such data using exact equation of ellipsometry. Finally, the report describes the development of a model and its preliminary evaluation for non-destructive depth profiling of elemental concentrations with the help of soft x-ray spectroscopy.
Document Details
- Document Type
- Technical Report
- Publication Date
- Dec 31, 1974
- Accession Number
- ADA005656
Entities
People
- E. W. White
- K. Vedam
Organizations
- Pennsylvania State University