Semiconductor Measurement Technology

Abstract

;Contents: Resistivity; dopant profiles; Crystal defects and contaminants; Oxide film characterization; Test patterns; Photolithography; Epitaxial layer thickness; Wafer inspection and test; Interconnection bonding; Hermeticity; Thermal properties of devices.

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Document Details

Document Type
Technical Report
Publication Date
Feb 01, 1975
Accession Number
ADA005669

Entities

People

  • W. M. Bullis

Organizations

  • National Institute of Standards and Technology

Tags

DTIC Thesaurus Topics

  • Accuracy
  • Chemistry
  • Electrical Measurement
  • Electron Microscopy
  • Electronics Industry
  • Electronics Laboratories
  • Energy Bands
  • Fermi Levels
  • Materials Science
  • Measurement
  • Metal Oxide Semiconductors
  • Microscopes
  • Modules (Electronics)
  • Oxide Films
  • Power Electronics
  • Semiconductor Devices
  • Semiconductors

Fields of Study

  • Materials science

Readers

  • Semiconductor Device Technology
  • Software Engineering

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene
  • Microelectronics - Microelectromechanical Systems