Characterization of Silicon Carbide.
Abstract
The various electrical and structural measurement techniques for silicon carbide are described. The electrical measurements include conductivity, resistivity, carrier concentration, mobility, doping energy levels, and lifetime. The structural measurements include polytype determination and crystalline perfection. Both bulk and epitaxial films are included.
Document Details
- Document Type
- Technical Report
- Publication Date
- Oct 30, 1974
- Accession Number
- ADA006409
Entities
People
- J. W. Faust Jr.
- R. B. Hilborn Jr
Organizations
- University of South Carolina