The Development, Building, and Testing of an Advanced Ion Microprobe (AIM) Ion Source System
Abstract
An Ion Microprobe was designed, built and tested which has demonstrated primary beam spot sizes of 0.3 micrometer and should be capable of spot sizes of 0.1 micrometer. The improved spot size over previously available devices is due to greatly reduced spherical aberration in the objective lens. A secondary ion and electron collection and focusing system permits secondary ions sputtered from the sample to be transmitted to a Mass Spectrometer for analysis or permits secondary electrons from the sample to be detected for the purpose of topographical imaging of the sample in a scanning electron or scanning ion microscope mode.
Document Details
- Document Type
- Technical Report
- Publication Date
- Nov 26, 1974
- Accession Number
- ADA008411
Entities
People
- Henry J. Roden
- Richard D. Fralick
- Richard T. Martin