Fabrication of Micrometer Line Width SAW Filters Using Direct Optical Projection

Abstract

Projection printing directly on acoustic substrates using a 10X master and a high resolution 10:1 reduction lens in conjunction with the photoresist stripping technique has resulted in successful fabrication of micrometer line-width SAW filters, which are used in command, control, and communications and electronic sensing applications. This system and a typical 320 MHz (1.26 micrometer line width) SAW filter are described in detail.

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Document Details

Document Type
Technical Report
Publication Date
Jan 28, 1975
Accession Number
ADA008488

Entities

People

  • A. J.
  • W. J. Kearns

Organizations

  • Air Force Cambridge Research Laboratories

Tags

Communities of Interest

  • Air Platforms

DTIC Thesaurus Topics

  • Acoustic Waves
  • Bandpass Filters
  • Fabrication
  • Filters
  • Frequency
  • High Resolution
  • Insertion Loss
  • Light Sources
  • Losses
  • Micrometers
  • Spectrum Analyzers
  • Substrates
  • Surface Acoustic Wave Devices
  • Surface Acoustic Waves
  • Surface Waves
  • Waves

Fields of Study

  • Physics

Readers

  • Computer Science/Computer Engineering/Data Science/Digital Signal Processing.
  • Microwave Engineering.
  • Optical Physics and Photonics.

Technology Areas

  • Microelectronics