Modification and Redesign of an Auger Electron Analysis System.

Abstract

A Scanning Auger Microscope (SAM) designed by the General Electric Corporation and installed in the Air Force Avionics Laboratory (AFAL) did not function properly. Malfunctions were identified and corrected. Necessary modifications and redesign of units include: design of an emitter source; power supply modifications; design and fabrication of alignment mechanism, bake-out assemblies, and filament testing units; redesign of the detector circuit; rearrangement of major components in the UHV system; redesign of the voltage distribution system for a sputter fun. Successful Auger electron analyses were demonstrated on various samples containing Nb, Cl, C, N, O, Cu, Fe, Ni, Y, Sm, and Si.

Document Details

Document Type
Technical Report
Publication Date
Dec 01, 1974
Accession Number
ADA008706

Entities

People

  • James Selph

Organizations

  • Air Force Institute of Technology

Tags

DTIC Thesaurus Topics

  • Air Force
  • Assembly
  • Auger Electrons
  • Avionics
  • Buildings And Structures
  • Corporations
  • Detectors
  • Electrons
  • Fabrication
  • Filaments
  • Malfunctions
  • Microscopes
  • Power Supplies
  • Research Facilities
  • Scanning

Readers

  • Software Engineering
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene
  • Microelectronics - Microelectromechanical Systems