Final Letter Report on Phase 1 of Contract N00014-75-C-0003,

Abstract

This report summarizes the work done at Accelerators, Inc., toward achieving the goals on the 'Procurement Description, Ion Implantation System'. Special emphasis has been placed on certain requirements which are: (1) System must be small and lightweight; (2) must implant ultrapure 27Al(+) with complete freedom from 23Na(+) contamination; (3) able to operate for long periods unattended; (4) must achieve relatively high scanned beam currents at low energies.

Document Details

Document Type
Technical Report
Publication Date
Apr 17, 1975
Accession Number
ADA009325

Entities

People

  • Joe Cecil

Tags

DTIC Thesaurus Topics

  • Contamination
  • Contracts
  • Implantation
  • Ion Implantation
  • Ions
  • Lightweight
  • Procurement

Fields of Study

  • Physics

Readers

  • Plasma Physics.
  • Software Engineering
  • Thin Film Deposition Science.