Radiation Effects on Oxides, Semiconductors, and Devices.
Abstract
Contents: Oxide studies--Hole and electron transport in SiO2 films, Charge transport studies in SiO2: processing effects and implications for radiation hardening, Ionizing dose rate effects in MOS devices, Experiments on MOS capacitors fabricated on a p-type silicon substrate, Ion microanalyzer measurements on SiO2 films, Effects of bias polarity on current flow in SiO2 under electron beam injection, Studies of charge transport and charge buildup in pure SiO2 and Al+-implanted pure SiO2, Determination of hole mobility in SiO2 films; Semiconductor studies.
Document Details
- Document Type
- Technical Report
- Publication Date
- May 01, 1975
- Accession Number
- ADA010781
Entities
People
- Joseph. R. Srour
- Kuang Y. Chiu
- Orlie L. Curtis Jr.
- Siegfried Othmer